
➀Purpose
・We want to measure the bottom surface with high precision after EDM machining.
・We want to inspect the condition of the machined surface on the machine.
②Key Points for Implementation
[The “NK-3000” on-machine measuring machine from Kumamoto Seiken Kogyo, featuring a newly developed imaging unit based on the phase shift method]
・Enables on-machine inspection of bottom surface profiles with height variations, which previously could only be measured off-machine
・Capable of measuring height variations, irregularities, and steps on machined surfaces

③Examples
Measuring microscopic steps created by electrical discharge machining

➡Thanks to its measurement capability with a resolution of 2.5 μm, it was possible to measure a step height of 18 μm.
④Results
1) High-precision measurement of height differences (in the Z-axis direction)—which was not possible with conventional image-based in-flight measurement—is now achievable.
2) The camera unit was capable of in-flight measurement of height differences ranging from 0 to 500 μm within a 6 × 4 mm field of view, with a resolution of 2.5 μm.
3) In addition to verifying the overall shape, it was possible to inspect surface irregularities in-flight.
We will be exhibiting a working model of this product at the Machine Element Technology Exhibition,to be held at Tokyo Big Sight from June 21 to 23, 2023.

